direkt zum Inhalt springen

direkt zum Hauptnavigationsmenü

Sie sind hier

TU Berlin

Inhalt des Dokuments

Suche nach Publikationen




Publikationen

Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
Zitatschlüssel IWASI_2015_Workshop_Schröder
Autor S. Schröder, O. Dogan, j. Schneidewind, G. Bertotti, S. Keil, H. Gargouri, M. Arens, E. Brose, J. Bruns, D. Wolansky, B. Tillack, S. Vassanelli, B. Szszka, and R. Thewes
Buchtitel Proc. IEEE International Workshop on Advances in Sensors and Interfaces (IWASI)
Seiten pp. 21-24
Jahr 2015
DOI 10.1109/IWASI.2015.7184978
Ort Gallipoli, Italien
Monat 18-19 June
Zusammenfassung Titanium dioxide, known as a high-k biocompatible dielectric transducer material, is processed by means of ALD and applied to a 3D structure with dimensions typical for multi-site multi-channel in-vivo neural interfaces. High uniformity, high areal capacitance, and in particular low leakage current densities are achieved within a sufficiently wide operation voltage window. The results demonstrate the suitability of this process to provide dielectric interfaces for 3D biomedical applications.
Download Bibtex Eintrag

Nach oben

Zusatzinformationen / Extras

Direktzugang

Schnellnavigation zur Seite über Nummerneingabe